Obtaining and Maintaining of Clean High Vacuum on the Material Outgassing Test System

Xiao Bin Wu; Yan Luo; Kui Bo Wang

doi:10.4028/www.scientific.net/KEM.723.111

Paper Titles

Magnetic and Electrical Properties of Iron-Based Soft Magnetic Composites with Silicone Resin Insulation Coating
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Fracture Model of ZrO₂-Al₂O₃Ceramic Composite
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Study on Equivalent Viscous Damping of Aeolian Vibration for Transmission Line by AACSR-400 Steel Core Aluminum Alloy Wire
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Positive Effects of High-Temperature Steel Creep Behavior on Continuous Casting Slab
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Obtaining and Maintaining of Clean High Vacuum on the Material Outgassing Test System
p.111

Study on the Mechanical Property of 20Cr13 Stainless Steel Barrel Processed by Cold Radial Forging
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A Brief Discussion about Nickel Aluminum Bronze Propeller Failure Modes and its Repair Methods
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Neutron Spectrometer Used for Nondestructive Detection of Materials Deep Stress: Status of the Project
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Research on Torsion Beam with High Strength Steel Materials Forming
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 723Obtaining and Maintaining of Clean High Vacuum on...

Obtaining and Maintaining of Clean High Vacuum on the Material Outgassing Test System

Abstract:

A system was developed to test the outgassing of materials intended to use in Extreme Ultraviolet Lithography (EUVL). Clean high vacuum was achieved on the background by proper cleaning, processing and assembling, as well as by combining the magnetic levitated molecular pump with the dry mechanical pump. Much more care should be taken to operate this system to avoid introducing any contamination. Once the vacuum chamber is polluted by high-risk items like water (H₂O) and hydrocarbons (C_xH_y), it should not be applied again. It is recognized experimentally that clean vacuum could be recovered by flushing with dry gases, baking and degassing, and baking is undoubtedly a more effective technique in efforts of controlling the pollution.

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Proceedings of International Conference on Material Science and Engineering 2016

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Periodical:

Key Engineering Materials (Volume 723)

Pages:

111-118

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.723.111

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Online since:

December 2016

Authors:

Xiao Bin Wu, Yan Luo*, Kui Bo Wang

Keywords:

Baking, Clean Vacuum, Degassing, Material Outgassing, Vacuum Pollution

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