From Octamethylcyclotetrasilazane (OMCTS) via Crystalline Silicon Nitride Imide Si2N2NH to α-Si3N4

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Periodical:

Key Engineering Materials (Volumes 89-91)

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Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

81-86

DOI:

10.4028/www.scientific.net/KEM.89-91.81

Citation:

S. Schaible et al., "From Octamethylcyclotetrasilazane (OMCTS) via Crystalline Silicon Nitride Imide Si2N2NH to α-Si3N4", Key Engineering Materials, Vols. 89-91, pp. 81-86, 1994

Online since:

August 1993

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