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HomeKey Engineering MaterialsKey Engineering Materials Vols. 89-91A Synthesis of Mono-Crystalline Silicon Nitride...

A Synthesis of Mono-Crystalline Silicon Nitride Filaments

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Silicon Nitride '93

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Periodical:

Key Engineering Materials (Volumes 89-91)

Pages:

87-94

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.89-91.87

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Online since:

August 1993

Authors:

K.J. Hüttinger, T.W. Pieschnick

Keywords:

Catalytic CVD Process, Silicon Nitride Filaments, Strength, Structure

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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