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HomeKey Engineering MaterialsKey Engineering Materials Vols. 89-91Nanosized Si3N4/SiC-Powders by...

Nanosized Si₃N₄/SiC-Powders by Polysilazane/Polycarbosilane-Pyrolsysis

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Silicon Nitride '93

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Periodical:

Key Engineering Materials (Volumes 89-91)

Pages:

107-112

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.89-91.107

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Online since:

August 1993

Authors:

Gottfried Boden, M. Keuthen

Keywords:

Ammonolysis, Dechlorination, Gas Phase, Nanosized Powder, Polycarbosilane, Polysilazanes, Pyrolysis, Silicon Carbide (SiC), Synthesis

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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