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HomeKey Engineering MaterialsKey Engineering Materials Vols. 89-91Crystallization of Amorphous Silicon Carbonitride...

Crystallization of Amorphous Silicon Carbonitride Investigated by Transmission Electron Microscopy (TEM)

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Silicon Nitride '93

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Periodical:

Key Engineering Materials (Volumes 89-91)

Pages:

95-100

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.89-91.95

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Online since:

August 1993

Authors:

Martin Friess, Joachim Bill, Fritz Aldinger, D.V. Szabó, R. Riedel

Keywords:

Crystallization, ESI, Phase Separation, Silicon Carbonitride, TEM

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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