Crystallization of Amorphous Silicon Carbonitride Investigated by Transmission Electron Microscopy (TEM)

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Periodical:

Key Engineering Materials (Volumes 89-91)

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Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

95-100

DOI:

10.4028/www.scientific.net/KEM.89-91.95

Citation:

M. Friess et al., "Crystallization of Amorphous Silicon Carbonitride Investigated by Transmission Electron Microscopy (TEM) ", Key Engineering Materials, Vols. 89-91, pp. 95-100, 1994

Online since:

August 1993

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$35.00

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