Synthesis and Characterization of Semiconductor Composites Gas Sensors Based on ZnO Doped TiO₂ Thin Films by Laser-Induced Plasma

Abstract:

This work presents the development of n-type (TiO₂) and p-type (ZnO) gas-sensitive materials from ZnO doped TiO₂ thin films prepared by pulsed laser deposition technique (PLD) on a glass substrate as a gas sensor of CO₂ gas. TiO₂ gas-sensing layers have been deposited over a range of ZnO content (0, 20, and 40) wt %. The obtained thin films analysis by atomic force microscopy (AFM), and X-ray diffraction (XRD). Electrical characterization shows that TiO₂:ZnO thin films were p-type conductivity and ZnO added was unable to change the composition to the n-type conductivity. There are notable gas-sensing response differences between n-type and p-type ZnO doped TiO₂ thin film. The responses toward all tested oxidizing gases tend to increase with operating temperature for the n-type TiO₂ films. Besides, the p-type ZnO doping results in a significant response improvement toward tested oxidizing gases such as CO₂ gas at the low operating temperature of 60 °C.

• Periodical: Key Engineering Materials (Volume 900)
• Pages: 112-120
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.900.112
• Online since: September 2021
• Authors: Souad G. Khalil, Mahdi M. Mutter*
• Keywords: Gas Sensor, Laser-Induced Plasma, Nanoparticles Thin Films, Optical Properties, Sensing Gas, ZnO: TiO₂ Thin Films

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