Structural Analysis of DLC Thin Film Using X-Ray Reflectivity and Raman Spectroscopy Techniques

Abstract:

The characteristics of sputtered amorphous diamond-like carbon-containing copper (DLC: Cu films) films deposited on Si (100) substrates and Si (111) in argon gas-filled chamber using carbon target under different substrates deposition time, and RF power. The samples were deposited by RF magnetron sputtering and analyzed using Raman spectroscopy and X-ray reflectivity (XRR) methods. Different parameters of depositions were used to study the structure, thickness, roughness, and density of the samples. The Cu preliminary layer act as a catalyst to growth the DLC thin-film analyzed using XRR analysis to measure thickness, roughness, and density of the thin films. The film structures of the samples were analyzed using Raman spectroscopy with a 532nm laser source. Gaussian peak shapes were used in Raman spectrum fitting to analyzed to measure the D band and G band for both samples. The Films thickness, roughness, and mass density were studied by XRR techniques using XRD to acquire the multilayer structure of thin films grown by magnetron sputtering.

• Periodical: Key Engineering Materials (Volume 908)
• Pages: 543-548
• DOI: https://doi.org/10.4028/p-x8wahl
• Online since: January 2022
• Authors: Khairul Aizat Nadzari*, Muhammad Firdaus Omar, Nor Shahira Md Rudin, Abd. Khamim Ismail
• Keywords: Diamond-Like Carbon, Raman Spectroscopy, RF Magnetron Sputtering, XRR Analysis

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