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HomeKey Engineering MaterialsKey Engineering Materials Vol. 910Method of Diamond-Like Coatings Obtaining

Method of Diamond-Like Coatings Obtaining

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Abstract:

The article is devoted to the method of obtaining a diamond-like coating on a silicon substrate by laser ablation of a glassy carbon target in a vacuum. The presented technology makes it possible to achieve the synthesis of wear-resistant thin-film coatings with a thickness of about 200 nm. The diagnostics of the obtained coating was carried out using probe microscopy, the chemical and phase composition was estimated by the Raman spectra.

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Periodical:

Key Engineering Materials (Volume 910)

Pages:

636-641

DOI:

https://doi.org/10.4028/p-1qj8a5

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Online since:

February 2022

Authors:

Ruslan V. Chkalov*, Darya G. Chkalova

Keywords:

Diamond-Like Coatings, Laser Ablation, Raman Spectra, Thin Films, Wear Resistance

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© 2022 Trans Tech Publications Ltd. All Rights Reserved

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