Thin Ni/Al Metal Films Characterization Using a High-Frequency Electromagnetic Field

Abstract:

The paper presents methods of obtaining and studying new materials - thin metal films of the Ni/Al system. The technique and main parameters of the resistive method of thermal evaporation of the alloy using a vacuum universal station are briefly presented. Samples of thin films of various thicknesses were obtained. The thickness of the material was determined both using a scanning electron microscope and a developed eddy-current gage system operating under a hardware-software complex. In the course of the research, the limit the film thickness gauging capabilities of the developed gage system was established (400 nm). The ability of the gage system to detect differences in the thickness of the same film was shown using the developed method. Also, the possibility of determining the thickness of an undoubtedly unknown thin film by an eddy-current transducer signal amplitude has been demonstrated.

• Periodical: Key Engineering Materials (Volume 910)
• Pages: 893-901
• DOI: https://doi.org/10.4028/p-digld4
• Online since: February 2022
• Authors: Vladimir N. Malikov*, Nikolay D. Tihonskii, Alexey V. Ishkov
• Keywords: Eddy Current Transducer, Thickness, Thin Films, Vacuum Universal Station

References

[1] Vdovichenko A.YU. Synthesis, structure and properties of nanocomposites based on poly-para-xylylene, nickel and iron. PhD-thesis, Moscow 2019, 111 p.

[2] Chapon C., Henry C. R. 1985 Adsorption-desorption of a modulated atomic beam of cadmium on small gold particles deposited on a (100) NaCl surface Surface Sciense. 156(2) 952-962.

DOI: 10.1016/0039-6028(85)90271-7

[3] Stiehler C., Pan Y., Schneider W. D. 2013 Electron quantization in arbitrarily shaped gold islands on MgO thin films Physical Review B. 88 115415.

DOI: 10.1103/physrevb.88.115415

[4] Shao X., Cui Y., Nilius N. 2012 Growth of Two-Dimensional Lithium Islands on CaO(001) Thin Films The Journal of Physical Chemistry C. 116 17980-17984.

DOI: 10.1021/jp306328c

[5] Wang H.F., Ariga H., Dowler R. 2012 Surface science approach to catalyst preparation—Pd deposition onto thin Fe3O4(111) films from PdCl2 precursor Journal of Catalysis. 286 1-5.

DOI: 10.1016/j.jcat.2011.09.026

[6] Nolte P., Jin-Phillipp N.Y. 2011 Reversible Shape Changes of Pd Nanoparticles on MgO(100) Nano Letters. 11 4697-4700.

DOI: 10.1021/nl2023564

[7] Nolte P., Stierle A., Kasper N. 2008 Combinatorial high-energy x-ray microbeam study of the size-dependent oxidation of Pd nanoparticles on MgO(100) Physical Review B. 2008. 77 115444.

DOI: 10.1103/physrevb.77.115444

[8] Zhou W., Mandia J.D., Griffiths M. 2013 Polarization-dependent propertis of the cladding modes of a single mode fiber covered with gold nanoparticles Optics Express. 21 245-255.

DOI: 10.1364/oe.21.000245

[9] Tagad C., Dugasani S., Aiyer R. 2013 Green synthesis of silver nanoparticles and their application for the development of optical fiber based hydrogen peroxide sensor Sensors Actuators B. 183. 144-149.

DOI: 10.1016/j.snb.2013.03.106

[10] Choi S., Dickson R.M., Yu J. 2012 Developing luminescent silver nanodots for biological applications Chemical Society Reviews. 41 1867-1891.

DOI: 10.1039/c1cs15226b

[11] Stockman M.I. 2007 Plasmonic enhancing nanoantennas for photodetection Infrared Physics & Technology. 50 (2–3) 177-181.

DOI: 10.1016/j.infrared.2006.10.032

[12] Tseng C.W., Chen Y.L. 2012 Tuning electric bistability in pentacene film-based transistor embedding aluminum nanoparticles Organic Electronics. 13 1436-1442.

DOI: 10.1016/j.orgel.2012.04.002

[13] Jin X.R., Lu Y., Zheng H. 2011 Plasmonic electromagnetically-induced transparency in metamaterial based on second-order plasmonic resonance Optics Communications. 284 4766-4768.

DOI: 10.1016/j.optcom.2011.05.052

[14] Normatov A., Ginzburg P., Berkovitch N. 2010 Efficient coupling and field enhancement for the nano-scale: plasmonic needle Optics Express. 18 14079-14086.

DOI: 10.1364/oe.18.014079

[15] Chang R., Chiang H.P. 2005 Nonlocal effects in the optical response of composite materials with metallic nanoparticles Solid State Communications. 133 315-320.

DOI: 10.1016/j.ssc.2004.11.014

[16] Ma X., Benavides J., Haughn C.R. 2013 High polymer-LEDs enhancement by exciton–plasmon coupling using encapsulated metallic nanoparticles Organic Electronics. 14 1916-1923.

DOI: 10.1016/j.orgel.2013.04.033

[17] Chaplygin P.A. Structural-phase characteristics of the Ni-Al intermetallic compound near the equiatomic composition PhD-thesis. Barnaul, 2018 152 p.

[18] Vanyukhin K.D., Kobeleva S.P., Kontsevoy Yu.A. 2012 Investigation of the uniformity of surface resistance Ti, Al, Ni, Cr and Au metal films on silicon Materials of electronic technology. 4 33-37.

DOI: 10.1134/s1063739713080143

[19] Dunyushkina L.A. Introduction to methods of producing film electrolytes for solid oxide fuel cells: monograph. Ekaterinburg: URO RAN, 2015. 126 p.

[20] Dmitriev S., Ishkov A., Malikov V. 2020 Scanning the layered composites using subminiature eddy-current transducers Advances in Intelligent Systems and Computing. 982 701-708.

DOI: 10.1007/978-3-030-19756-8_66

[21] Dmitriev S., Ishkov A., Malikov V. 2020 Investigation of thermal fields at phase boundaries in powder mixtures that are subject to melting and chemical transformation Materials Science Forum. 992 1011-1015.

DOI: 10.4028/www.scientific.net/msf.992.1011