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HomeMaterials Science ForumMaterials Science Forum Vol. 1034Textured K0.5Na0.5NbO3 Thin Films by Aqueous...

Textured K_0.5Na_0.5NbO₃ Thin Films by Aqueous Chemical Solution Deposition on SrTiO₃ Substrates for MEMS Applications

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Abstract:

Na_0.5K_0.5NbO₃ (KNN) thin films were fabricated on (100) oriented SrTiO₃ substrates by spin coating a stable environmentally friendly aqueous KNN precursor. Homogeneous films with an average grain size down to 60 nm were observed after heat treatment at 900 °C. The high degree of texture was confirmed by XRD. The intensity of the KNN (100) reflection for films on (100) oriented substrates increased with increasing sintering temperature up to 900 °C. The ferroelastic and piezoelectric properties of the film was confirmed by PFM. Local piezoelectric properties of selected films will be discussed in relation to the processing conditions, microstructure and orientation of the substrate.

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Periodical:

Materials Science Forum (Volume 1034)

Pages:

111-116

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.1034.111

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Online since:

June 2021

Authors:

Ky Nam Pham*, Trong Dai Vu, Nguyen Dinh Nguyen, Tien Dat Vu

Keywords:

Piezoelectric, Textured, Thin Film

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© 2021 Trans Tech Publications Ltd. All Rights Reserved

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