Features of Obtaining Multicomponent Magnetron Targets for the Formation of Non-Porous Transformation-Hardenable Coatings of a Given Composition

Abstract:

The technological process of thin-film sputtering significantly depends on the quality of the target for magnetron sputtering. This paper presents the features of obtaining the multicomponent magnetron target for the formation of non-porous transformation-hardenable coatings by the method of impact electric pulse consolidation. Special considerartion is given to the blend preparation and technological parameters of compaction. Blend powder consolidation under impact electric pulse compaction at different speeds of the striker has been investigated. At high speeds of the drop-hammer striker, the time parameters of the dynamic impact and electric pulse heating of the powder billet are shown to superpose, which leads to the final consolidation of the ceramic blend of the target for magnetron sputtering. The use of the technology of impact electric pulse compaction has made it possible to obtain multicomponent magnetron targets for formation of non-porous transformation-hardenable coatings of a given composition.

• Periodical: Materials Science Forum (Volume 1037)
• Pages: 503-508
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.1037.503
• Online since: July 2021
• Authors: Roman Plomodyalo*, Zhesfina Blednova, Dmitriy Dmitrenko
• Keywords: Consolidation, Impact Electric Pulse Compaction, Magnetron Target, Transformation-Hardenable Coatings

References

[1] Zh. M. Blednova, P. O. Rusinov, E. Y. Balaev, D. V. Dmitrenko, Improving product performance by forming surface compositions from shape memory effect materials with a gradient of properties and phase transformation // Material Design &Processing Communications. 2020. N 1. P. 1-7.

DOI: 10.1002/mdp2.132

[2] P. O. Rusinov, Zh. M. Blednova, Structural behavior and mechanical properties of high-entropy coatings synthesized by HVOF. ICE Publishing Surface Innovations https://doi.org/10.1680/jsuin.20.00052.

DOI: 10.1680/jsuin.20.00052

[3] Zh. M. Blednova, P. O. Rusinov, (2019) Formation of surface layers from highly entropic materials with shape memory effect. AIP Conference Proceedings 2167(1): Article 020035.

DOI: 10.1063/1.5131902

[4] A.O. Zhigachev, Yu.I. Golovin, A.V. Umrikhin, Ceramic materials based on zirconia, TEKHNOSPHERA, Moscow, (2018).

[5] E.G. Skripnyak, V.A. Skripnyak, S.S. Kulkov, M.V. Korobenkov, V.A. Skripnyak, Simulation of the mechanical behavior of ceramic composites with a transformation-hardened matrix under dynamic effects. Bulletin of Tomsk State University. Mathematics and Mechanics, 2010, No. 2, p.pp.84-101.

DOI: 10.1007/s11182-010-9371-8

[6] A.G. Evans, REVIEW—Transformation Toughening in Ceramics: Martensitic Transformations in Crack-Tip Stress Fields, Journal of the American Ceramic Society, 2006, 63(5‐6), p.241 – 248.

DOI: 10.1111/j.1151-2916.1980.tb10712.x

[7] L I. Svistun, D. V. Dmitrenko. Apparatus for comprehensive research of power parameters of high-speed pressing and stamping of carbide steels, Materials engineering: Interuniversity collection of scientific articles, KUBGTU, 2009, No 3, pp.97-101.

[8] E.G. Grigoryev, E.A. Olevsky, Thermal processes during high-voltage electric discharge consolidation of powder materials. Scripta Materialia, v. 66, issue 9, (2012) 662-665.

DOI: 10.1016/j.scriptamat.2012.01.035

[9] E.G. Grigoryev, E.A. Olevsky, A. V. Yudin, M. S. Yurlova, Wave mode high voltage consolidation of powder materials. Computational Materials Science, v. 100, A, (2015) 8-14.

DOI: 10.1016/j.commatsci.2014.10.067

[10] R. L. Plomodyalo, E. G. Grigoryev, L. I. Svistun, D. V. Dmitrenko, Features of shock pressing and electro-impulse heating during consolidation of a powder material. IOP Conference Series: Materials Science and Engineering. 2019.

DOI: 10.1088/1757-899x/558/1/012032