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HomeMaterials Science ForumMaterials Science Forum Vols. 105-110Positron Beam Analysis of Amorphous Silicon

Positron Beam Analysis of Amorphous Silicon

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Periodical:

Materials Science Forum (Volumes 105-110)

Pages:

1391-1394

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.105-110.1391

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Cite this paper

Online since:

January 1992

Authors:

R.A. Hakvoort, S. Roorda, A. van Veen, M.J. van den Boogaard, F.J.M. Buters, H. Schut

Keywords:

Amorphous Silicon, Chemical Vapor Deposition (CVD), Defect, Hydrogenation, Ion Implantation, Positron Analysis, Sputtering

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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