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HomeMaterials Science ForumMaterials Science Forum Vols. 105-110Implantation and Diffusion in Thin Films

Implantation and Diffusion in Thin Films

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Periodical:

Materials Science Forum (Volumes 105-110)

Pages:

1431-1434

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.105-110.1431

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Online since:

January 1992

Authors:

Mogens Ryshol Poulsen, G. Laricchia, M. Charlton, K.O. Jensen, A.B. Walker

Keywords:

Diffusion Length, Implantation, Thin Film

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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