Defect Observation in Silicon Surface Layers by Surface Wave Resonance in RHEED

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Periodical:

Materials Science Forum (Volumes 117-118)

Edited by:

Tsunemasa Taguchi

Pages:

273-278

DOI:

10.4028/www.scientific.net/MSF.117-118.273

Citation:

K. Ueda "Defect Observation in Silicon Surface Layers by Surface Wave Resonance in RHEED ", Materials Science Forum, Vols. 117-118, pp. 273-278, 1993

Online since:

January 1993

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$35.00

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