[1]
J.-H. He, From micro to nano and from science to technology: nano age makes the impossible possible, Micro Nano Syst. 12 (2020) 2–3.
DOI: 10.2174/187640291201191002101844
Google Scholar
[2]
P. Di Barba, S. Wiak, MEMS modelling: distributed versus lumped parameter models, in: MEMS: Field Models and Optimal Design, 2020, p.5–7.
DOI: 10.1007/978-3-030-21496-8_2
Google Scholar
[3]
J. Korvink, O. Paul, MEMS: A Practical Guide of Design, Analysis, and Applications, Springer Science & Business Media, 2010.
Google Scholar
[4]
J.W. Gardner, V.K. Varadan, O.O. Awadelkarim, Microsensors, MEMS, and Smart Devices, Wiley, 2001.
DOI: 10.1002/9780470846087.ch14
Google Scholar
[5]
Y. Dai, Y. Bai, Z. Cai, Thermal and mechanical evaluation on integration of GFRP and thin-film flexible PV cells for building applications, J. Clean. Prod. 289 (2021) 125809.
DOI: 10.1016/j.jclepro.2021.125809
Google Scholar
[6]
I.D. Johnston, D.K. McCluskey, C.K.L. Tan, M.C. Tracey, Mechanical characterization of bulk Sylgard 184 for microfluidics and microengineering, J. Micromech. Microeng. 24 (2014) 035017.
DOI: 10.1088/0960-1317/24/3/035017
Google Scholar
[7]
K. Bazaka, O. Baranov, U. Cvelbar, B. Podgornik, Y. Wang, S. Huang, L. Xu, J.W.M. Lim, I. Levchenko, S. Xu, Oxygen plasmas: a sharp chisel and handy trowel for nanofabrication, Nanoscale 10 (2018) 17494–17511.
DOI: 10.1039/c8nr06502k
Google Scholar
[8]
J. Inderherbergh, Polyvinylidene fluoride (PVDF) appearance, general properties and processing, Ferroelectrics 115 (1991) 295–302.
DOI: 10.1080/00150193.1991.11876614
Google Scholar
[9]
M.Z. Iqbal, F.U. Khan, M. Mehdi, P.E. Abas, M.M. Nauman, Power harvesting footwear based on piezo-electromagnetic hybrid generator for sustainable wearable microelectronics, J. King Saud Univ. Eng. Sci. 34 (2022) 329–338.
DOI: 10.1016/j.jksues.2020.11.003
Google Scholar
[10]
N. Duraisamy, M.M. Nauman, M. Hyun, K.H. Choi, Structural and electrical properties of P3HT:PCBM/PEDOT:PSS thin films deposited through electrohydrodynamic atomization technique, Mater. Lett. 92 (2013) 227–230.
DOI: 10.1016/j.matlet.2012.10.104
Google Scholar
[11]
K.H. Choi, M.M. Nauman, M.A.A. Rehmani, D. Kim, Hybrid piezo-electrostatic inkjet head for printed electronics, Proc. Inst. Mech. Eng. Part C J. Mech. Eng. Sci. 226 (2012) 842–857.
DOI: 10.1177/0954406211414985
Google Scholar
[12]
K.H. Choi, A. Ali, A. Rahman, S. Khan, D.S. Kim, Electrode configuration effects on the electrification and voltage variation in an electrostatic inkjet printing head, J. Micromech. Microeng. 20 (2010) 075033.
DOI: 10.1088/0960-1317/20/7/075033
Google Scholar
[13]
M.M. Nauman, N. Duraisamy, H. Dang, J. Jeongdai, K.H. Choi, Solution processed Al doped ZnO film fabrication through electrohydrodynamic atomization, Thin Solid Films 520 (2012) 6398–6403.
DOI: 10.1016/j.tsf.2012.06.050
Google Scholar
[14]
J.C. McDonald, D.C. Duffy, J.R. Anderson, D.T. Chiu, H. Wu, O.J.A. Schueller, G.M. Whitesides, Fabrication of microfluidic systems in poly(dimethylsiloxane), Electrophoresis 21 (2000) 27–40.
DOI: 10.1002/(sici)1522-2683(20000101)21:1<27::aid-elps27>3.0.co;2-c
Google Scholar
[15]
M. Hu, F. Xiao, Q.-F. Ke, Y. Li, X.-D. Chen, Y.-P. Guo, Cerium-doped whitlockite nanohybrid scaffolds promote new bone regeneration via Smad signaling pathway, Chem. Eng. J. 359 (2019) 1–12.
DOI: 10.1016/j.cej.2018.11.116
Google Scholar
[16]
R. Ramalingame, A. Lakshmanan, F. Müller, U. Thomas, O. Kanoun, Highly sensitive capacitive pressure sensors for robotic applications based on carbon nanotubes and PDMS polymer nanocomposite, J. Sens. Sens. Syst. 8 (2019) 87–94.
DOI: 10.5194/jsss-8-87-2019
Google Scholar
[17]
S. Choi, S. Lee, B. Lee, T. Kim, Y. Hong, Selective crack formation on stretchable silver nano-particle based thin films for customized and integrated strain-sensing system, Thin Solid Films 707 (2020) 138068.
DOI: 10.1016/j.tsf.2020.138068
Google Scholar
[18]
E.-H. Ko, H.-J. Kim, S.-M. Lee, T.-W. Kim, H.-K. Kim, Stretchable Ag electrodes with mechanically tunable optical transmittance on wavy-patterned PDMS substrates, Sci. Rep. 7 (2017) 46739.
DOI: 10.1038/srep46739
Google Scholar