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Materials Science Forum
Vols. 140-142
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Materials Science Forum Vols. 140-142

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142

ToC:

Table of Contents

Paper Title Page

Effects of ECR-Plasma Excitation in GaAs MBE Growth
Authors: T. Shibata, N. Yamamoto, Naoki Kondo, Y. Nanishi, M. Fujimoto
689
Plasma Treatment of Polymers for Improved Adhesion Properties
Authors: S. Nowak, O.M. Küttel
705
Study of Dry Development in Terms of Resist and Development Method
Authors: N. Abe, T. Motoyama
727

Showing 41 to 43 of 43 Paper Titles

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