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HomeMaterials Science ForumMaterials Science Forum Vols. 148-149

Materials Science Forum Vols. 148-149

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.148-149

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Table of Contents

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Paper Title Page

Hydrogen in Compound Semiconductors-Introduction

Authors: Stephen J. Pearton

1

The Role of Hydrogen in UHV Growth of III-V Semiconductors

Authors: C.R. Abernathy

3

The Role of Hydrogen in the Growth of III-V Compound Semiconductors by OMVPE

Authors: W.S. Hobson

27

Role of Hydrogen in Semiconductor, Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition

Authors: A. Feingold, A. Katz

61

Hydrogenation of III-V Semiconductors during Processing

Authors: Stephen J. Pearton

113

Sources of Hydrogen in III-V Device Processing

Authors: Fan Ren

141

Plasma Passivation of III-V Semiconductor Surfaces

Authors: E.S. Aydil, R.A. Gottscho

159

Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

Authors: John M. Zavada, R.G. Wilson

189

Hydrogen Diffusion in Compound Semiconductors

Authors: Jacques Chevallier

219

Vibrational Spectroscopy of Dopant-Hydrogen Complexes in III-V Semiconductors

Authors: Michael Stavola

251

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