Hydrogen in Compound Semiconductors-Introduction
p.1
p.1
The Role of Hydrogen in UHV Growth of III-V Semiconductors
p.3
p.3
The Role of Hydrogen in the Growth of III-V Compound Semiconductors by OMVPE
p.27
p.27
Role of Hydrogen in Semiconductor, Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition
p.61
p.61
Hydrogenation of III-V Semiconductors during Processing
p.113
p.113
Sources of Hydrogen in III-V Device Processing
p.141
p.141
Plasma Passivation of III-V Semiconductor Surfaces
p.159
p.159
Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing
p.189
p.189
Hydrogen Diffusion in Compound Semiconductors
p.219
p.219
The Role of Hydrogen in the Growth of III-V Compound Semiconductors by OMVPE
Abstract:
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Periodical:
Materials Science Forum (Volumes 148-149)
Pages:
27-60
Citation:
Online since:
December 1993
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Сopyright:
© 1994 Trans Tech Publications Ltd. All Rights Reserved
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