Plasma Passivation of III-V Semiconductor Surfaces

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Periodical:

Materials Science Forum (Volumes 148-149)

Edited by:

S.J. Pearton

Pages:

159-188

DOI:

10.4028/www.scientific.net/MSF.148-149.159

Citation:

E.S. Aydil and R.A. Gottscho, "Plasma Passivation of III-V Semiconductor Surfaces", Materials Science Forum, Vols. 148-149, pp. 159-188, 1994

Online since:

December 1993

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$35.00

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