Sources of Hydrogen in III-V Device Processing
p.141
p.141
Plasma Passivation of III-V Semiconductor Surfaces
p.159
p.159
Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing
p.189
p.189
Hydrogen Diffusion in Compound Semiconductors
p.219
p.219
Vibrational Spectroscopy of Dopant-Hydrogen Complexes in III-V Semiconductors
p.251
p.251
Hydrogen in Crystalline Gallium Phosphide
p.281
p.281
Hydrogen in Ternary and Quaternary Materials
p.295
p.295
Shallow Levels Passivation in Implanted and Plasma Hydrogenated Compound Semiconductors
p.321
p.321
Theoretical and μSR Studies Related to Hydrogen in Compound Semiconductors
p.349
p.349
Vibrational Spectroscopy of Dopant-Hydrogen Complexes in III-V Semiconductors
Abstract:
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Periodical:
Materials Science Forum (Volumes 148-149)
Pages:
251-280
Citation:
Online since:
December 1993
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© 1994 Trans Tech Publications Ltd. All Rights Reserved
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