Shallow Levels Passivation in Implanted and Plasma Hydrogenated Compound Semiconductors

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Periodical:

Materials Science Forum (Volumes 148-149)

Edited by:

S.J. Pearton

Pages:

321-348

DOI:

10.4028/www.scientific.net/MSF.148-149.321

Citation:

B. Pajot "Shallow Levels Passivation in Implanted and Plasma Hydrogenated Compound Semiconductors", Materials Science Forum, Vols. 148-149, pp. 321-348, 1994

Online since:

December 1993

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