Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

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Periodical:

Materials Science Forum (Volumes 148-149)

Edited by:

S.J. Pearton

Pages:

189-218

DOI:

10.4028/www.scientific.net/MSF.148-149.189

Citation:

J. M. Zavada and R.G. Wilson, "Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing", Materials Science Forum, Vols. 148-149, pp. 189-218, 1994

Online since:

December 1993

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$35.00

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