Role of Hydrogen in Semiconductor, Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition
p.61
p.61
Hydrogenation of III-V Semiconductors during Processing
p.113
p.113
Sources of Hydrogen in III-V Device Processing
p.141
p.141
Plasma Passivation of III-V Semiconductor Surfaces
p.159
p.159
Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing
p.189
p.189
Hydrogen Diffusion in Compound Semiconductors
p.219
p.219
Vibrational Spectroscopy of Dopant-Hydrogen Complexes in III-V Semiconductors
p.251
p.251
Hydrogen in Crystalline Gallium Phosphide
p.281
p.281
Hydrogen in Ternary and Quaternary Materials
p.295
p.295
Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing
Abstract:
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Periodical:
Materials Science Forum (Volumes 148-149)
Pages:
189-218
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Online since:
December 1993
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© 1994 Trans Tech Publications Ltd. All Rights Reserved
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