Paper Titles

Hydrogen in Compound Semiconductors-Introduction
p.1

The Role of Hydrogen in UHV Growth of III-V Semiconductors
p.3

The Role of Hydrogen in the Growth of III-V Compound Semiconductors by OMVPE
p.27

Role of Hydrogen in Semiconductor, Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition
p.61

Hydrogenation of III-V Semiconductors during Processing
p.113

Sources of Hydrogen in III-V Device Processing
p.141

Plasma Passivation of III-V Semiconductor Surfaces
p.159

Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing
p.189

Hydrogen Diffusion in Compound Semiconductors
p.219

HomeMaterials Science ForumMaterials Science Forum Vols. 148-149Role of Hydrogen in Semiconductor, Dielectric and...

Role of Hydrogen in Semiconductor, Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition

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Hydrogen in Compound Semiconductors

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Periodical:

Materials Science Forum (Volumes 148-149)

Pages:

61-112

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.148-149.61

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Online since:

December 1993

Authors:

A. Feingold, A. Katz

Keywords:

Hydrogen, InP, RTOVD, SiO₂, Titanium Nitride TiN, WSi_x, Zn

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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