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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142

Materials Science Forum Vols. 140-142

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142

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Table of Contents

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Paper Title Page

Thermal Plasma Chemical Vapor Deposition

Authors: J.V.R. Heberlein, E. Pfender

477

Thermally Sprayed Coatings for Electrical and Electronic Applications

Authors: L. Pawlowski, Pierre Fauchais

497

ECR Plasma Etching Technology for ULSI

Authors: S. Samukawa

521

Evaluation of Substrate Degradation in Plasma Etch Processes Using Thermal Wave Analysis

Authors: M. Engelhardt

541

Plasma Etching of Patterned Tungsten

Authors: S. Franssila

565

Microwave Plasma Oxidation of Silicon

Authors: Shigeru Kimura

583

Hydrogen Interaction with Disordered Silicon

Authors: S. Ashok, K. Srikanth

603

Damage Assessment of Dry Etched III-V Semiconductors for Nanoelectronics

Authors: R. Cheung

619

Reactive Ion Beam Etching for Microcavity Surface Emitting Laser Fabrication: Technology and Damage Characterization

Authors: A. Matsutani, T. Tadokoro, F. Koyama, K. Iga

641

Alkane Plasma Etching of Gallium Arsenide

Authors: V.J. Law, M. Tewordt, S.G. Ingram, G.A.C. Jones

659

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