Plasma Properties, Deposition and Etching

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Authors: J.V.R. Heberlein, E. Pfender
477
Authors: S. Samukawa
521
Authors: S. Franssila
565
Authors: Shigeru Kimura
583
Authors: S. Ashok, K. Srikanth
603
Authors: V.J. Law, M. Tewordt, S.G. Ingram, G.A.C. Jones
659

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