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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Thermodynamic Properties of Self-Interstitials in...

Thermodynamic Properties of Self-Interstitials in Silicon: An Experimental Investigation

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

785-790

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.785

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Online since:

October 1993

Authors:

Hartmut Bracht, Nicolaas Stolwijk, Helmut Mehrer

Keywords:

Diffusivity, Equilibrium Concentration, Self-Interstitial, Silicon

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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