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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Diffusion of Charged Hydrogen in Semiconductors

Diffusion of Charged Hydrogen in Semiconductors

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

867-872

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.867

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Online since:

October 1993

Authors:

N.M. Johnson, C. Herring

Keywords:

Charge Exchange, Defect Reactions, Diffusion, DLTS, Drift, GaAs, H, Silicon

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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