Mapping of Defect-Related Silicon Properties with the ELYMAT Technique in Three Dimensions

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Periodical:

Materials Science Forum (Volumes 173-174)

Edited by:

M. Briege, H. Dittrich, M. Klose, H.W. Schock, J. Werner

Pages:

159-164

DOI:

10.4028/www.scientific.net/MSF.173-174.159

Citation:

J. Carstensen et al., "Mapping of Defect-Related Silicon Properties with the ELYMAT Technique in Three Dimensions", Materials Science Forum, Vols. 173-174, pp. 159-164, 1995

Online since:

September 1994

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Price:

$35.00

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