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HomeMaterials Science ForumMaterials Science Forum Vols. 173-174Laser Pulsed Induced Microwave Conductivity and...

Laser Pulsed Induced Microwave Conductivity and Spectroscopic Ellipsometry Characterization of Helium and Hydrogen Plasma Damage of the Crystalline Silicon Surface

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Periodical:

Materials Science Forum (Volumes 173-174)

Pages:

209-214

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.173-174.209

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Online since:

September 1994

Authors:

H.C. Neitzert, N. Layadi, Pere Roca i Cabarrocas, R. Vanderhaghen, M. Kunst

Keywords:

Crystalline Silicon, Electronic Defects, In Situ Characterization, Microwave Reflection, Plasma Etching, Spectroscopic Ellipsometry (SE)

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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