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HomeMaterials Science ForumMaterials Science Forum Vols. 173-174Contactless Characterization of Semiconductors...

Contactless Characterization of Semiconductors Using Laser-Induced Surface Photo-Charge Voltage Measurements

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Semiconductor Processing and Characterization with Lasers

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Periodical:

Materials Science Forum (Volumes 173-174)

Pages:

221-226

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.173-174.221

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Online since:

September 1994

Authors:

A. Abbate, P. Rencibia, O. Ivanov, G. Masini, F. Palma, P. Das

Keywords:

Semiconductor Characterization, Spectroscopy, Surface Charge, Surface States, ZnSe

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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