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HomeMaterials Science ForumMaterials Science Forum Vols. 173-174Raman Studies of Doped Poly-Si Thin Films Prepared...

Raman Studies of Doped Poly-Si Thin Films Prepared by Pulsed Excimer Laser Annealing

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Periodical:

Materials Science Forum (Volumes 173-174)

Pages:

197-202

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.173-174.197

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Online since:

September 1994

Authors:

A. Compaan, M.E. Savage, U. Jayamaha, T. Azfar, A. Aydinli

Keywords:

Annealing, Excimer, Fano Interference, Laser, Polycrystalline, Raman Scattering, Silicon

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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