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Deformation-Induced Defects in GaSb
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Damages in AlGaAs/GaAs Heterostructures Induced by KeV-Electron-Beam Irradiation
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TEM Investigation of Point Defect Interactions in II-VI Compounds
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Athermal Motion of Donors under Ultrasound in CdS Crystals
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Chemical Identification on the Atomic Scale in MBE-Grown III-V Alloy Semiconductors
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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Damages in AlGaAs/GaAs Heterostructures Induced by...

Damages in AlGaAs/GaAs Heterostructures Induced by KeV-Electron-Beam Irradiation

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

1455-1460

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.1455

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Online since:

November 1995

Authors:

Toshimi Wada, Toshihiko Kanayama, Tetsuya Tada, Xue Lun Wang, Yoshinobu Sugiyama, Masanori Komuro

Keywords:

2DEG, AlGaAs/GaAs, As Vacancy, Cathodoluminescence, Electron Beam Lithography, Irradiation-Induced Damage, Mobility, Photoluminescence (PL)

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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