Damages in AlGaAs/GaAs Heterostructures Induced by KeV-Electron-Beam Irradiation

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Periodical:

Materials Science Forum (Volumes 196-201)

Edited by:

M. Suezawa and H. Katayama-Yoshida

Pages:

1455-1460

DOI:

10.4028/www.scientific.net/MSF.196-201.1455

Citation:

T. Wada et al., "Damages in AlGaAs/GaAs Heterostructures Induced by KeV-Electron-Beam Irradiation", Materials Science Forum, Vols. 196-201, pp. 1455-1460, 1995

Online since:

November 1995

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