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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Profiling the Deep Levels inSiGe/Si Microstructure...

Profiling the Deep Levels inSiGe/Si Microstructure by Small-Pulse Deep Level Transient Spectroscopy

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

485-490

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.485

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Online since:

November 1995

Authors:

Rong Zhang, Kai Yang, Guoyi Qing, Yi Shi, Shu Lin Gu, Rong Hua Wang, Li Qun Hu, Weizhong Gao, You Dou Zheng

Keywords:

Deep Traps, SiGe/Si Microstructure, Small-Pulse DLTS

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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