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Ion-Beam Modification of Semiconductors and Related Electronic Materials
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HomeMaterials Science ForumMaterials Science Forum Vols. 248-249Ion-Beam Modification of Semiconductors and...

Ion-Beam Modification of Semiconductors and Related Electronic Materials

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Materials Science Applications of Ion Beam Techniques

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Periodical:

Materials Science Forum (Volumes 248-249)

Pages:

67-72

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.248-249.67

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Online since:

May 1997

Authors:

R.G. Elliman

Keywords:

Electronic Material, Ion Implantation, Optoelectronics, Semiconductor

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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