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HomeMaterials Science ForumMaterials Science Forum Vols. 294-296Interface Structure Effects on the Fracture of...

Interface Structure Effects on the Fracture of Hard Thin Films

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Intergranular and Interphase Boundaries in Materials III

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Periodical:

Materials Science Forum (Volumes 294-296)

Pages:

633-636

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.294-296.633

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Online since:

November 1998

Authors:

N.R. Moody, A. Strojny, D.L. Medlin, J. Schneider, A. Talin, William W. Gerberich

Keywords:

Aluminium Nitride Substrates, Aluminium Oxide Substrates, Interface Structure, Interfacial Fracture, Tantalum Nitride Films

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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