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HomeMaterials Science ForumMaterials Science Forum Vols. 321-324The Investigation of Silicon anf Boron...

The Investigation of Silicon anf Boron Carbonitride Films Structure by Diffration of Sychrotron Radiation

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Periodical:

Materials Science Forum (Volumes 321-324)

Pages:

230-235

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.321-324.230

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Online since:

January 2000

Authors:

E.A. Maximovski, Gennagiy S. Yurjev, M.L. Kosinova, N.I. Fainer, M. Rumyantsev

Keywords:

Boron Carbonitride, Silicon Carbonitride, Synchrotron Radiation Diffraction, Thin Film Structure

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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