Strain-Texture Correlation in r.f. Magnetron Sputtered Thin Films

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Periodical:

Materials Science Forum (Volumes 321-324)

Edited by:

R. Delhez, E.J. Mittemeijer

Pages:

439-444

DOI:

10.4028/www.scientific.net/MSF.321-324.439

Citation:

M. Leoni et al., "Strain-Texture Correlation in r.f. Magnetron Sputtered Thin Films", Materials Science Forum, Vols. 321-324, pp. 439-444, 2000

Online since:

January 2000

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$35.00

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