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HomeMaterials Science ForumMaterials Science Forum Vols. 363-365Current and Potential Uses of Positron Beams to...

Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films

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Periodical:

Materials Science Forum (Volumes 363-365)

Pages:

15-19

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.363-365.15

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Online since:

April 2001

Authors:

K.P. Rodbell, M.P. Petkov, Marc H. Weber, Kelvin G. Lynn, W. Volksen, Robert D. Miller

Keywords:

Low Dielectric Constant Films, Porosity, Positron Beams, Positronium (Ps) Lifetime Distribution

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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