Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films

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Periodical:

Materials Science Forum (Volumes 363-365)

Edited by:

Werner Triftshäuser, Gottfried Kögel and Peter Sperr

Pages:

15-19

DOI:

10.4028/www.scientific.net/MSF.363-365.15

Citation:

K.P. Rodbell et al., "Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films", Materials Science Forum, Vols. 363-365, pp. 15-19, 2001

Online since:

April 2001

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$35.00

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