Current Trends in Ion Implantation

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Periodical:

Materials Science Forum (Volumes 363-365)

Edited by:

Werner Triftshäuser, Gottfried Kögel and Peter Sperr

Pages:

20-24

DOI:

10.4028/www.scientific.net/MSF.363-365.20

Citation:

R. Gwilliam "Current Trends in Ion Implantation", Materials Science Forum, Vols. 363-365, pp. 20-24, 2001

Online since:

April 2001

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$35.00

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