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HomeMaterials Science ForumMaterials Science Forum Vols. 378-381A Study of the Thermal Annealing Influence on the...

A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

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Periodical:

Materials Science Forum (Volumes 378-381)

Pages:

493-498

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.378-381.493

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Online since:

October 2001

Authors:

N.I. Fainer, E.A. Maximovski, M.L. Kosinova, M. Rumyantsev

Keywords:

Film Structure, Silicon Carbonitride, Synchrotron Radiation Diffraction, Thermal Annealing

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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