A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation

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Periodical:

Materials Science Forum (Volumes 378-381)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

493-498

DOI:

10.4028/www.scientific.net/MSF.378-381.493

Citation:

N.I. Fainer et al., "A Study of the Thermal Annealing Influence on the Structure and Phase Composition of Silicon Carbonitride Films by the Diffraction of Synchrotron Radiation", Materials Science Forum, Vols. 378-381, pp. 493-498, 2001

Online since:

October 2001

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