Evaluation of Interface Strength between Thin Films Fabricated on a Silicon Substrate for an Advanced LSI on the Basis of Fracture Mechanics Concept

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Periodical:

Materials Science Forum (Volumes 426-432)

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Edited by:

T. Candra, Jose Maria Torralba and T. Sakai

Pages:

3469-3474

DOI:

10.4028/www.scientific.net/MSF.426-432.3469

Citation:

T. Shibutani et al., "Evaluation of Interface Strength between Thin Films Fabricated on a Silicon Substrate for an Advanced LSI on the Basis of Fracture Mechanics Concept", Materials Science Forum, Vols. 426-432, pp. 3469-3474, 2003

Online since:

August 2003

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