TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques

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Periodical:

Materials Science Forum (Volumes 426-432)

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Edited by:

T. Candra, Jose Maria Torralba and T. Sakai

Pages:

3475-3480

Citation:

V. Martynov "TiNi Thin Films for Microactuators and Microdevices: Sputter Deposition and Processing Techniques", Materials Science Forum, Vols. 426-432, pp. 3475-3480, 2003

Online since:

August 2003

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$38.00

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