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HomeMaterials Science ForumMaterials Science Forum Vols. 445-446The Role of Impurities in the Formation of Voids...

The Role of Impurities in the Formation of Voids in Silicon

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Periodical:

Materials Science Forum (Volumes 445-446)

Pages:

180-182

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.445-446.180

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Online since:

January 2004

Authors:

P.J. Simpson, A.P. Knights

Keywords:

Defect, Doping, Garboldisham, Impurity, Silicon, Void

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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