ZnO:Ga Thin Films Produced by RF Sputtering at Room Temperature: Effect of the Power Density

Elvira Fortunato; V. Assunção; António Marques; Alexandra Gonçalves; Hugo Águas; Luís Pereira; Isabel Ferreira; Francisco Manuel Braz Fernandes; Rui Jorge C. Silva; Rodrigo Martins

doi:10.4028/www.scientific.net/MSF.455-456.12

Paper Titles

Preface

Advances in Electrochromic Materials and Devices
p.1

Physical Properties of Sputtered ITO and WO₃ Thin Films
p.7

ZnO:Ga Thin Films Produced by RF Sputtering at Room Temperature: Effect of the Power Density
p.12

Effect of Thermal Treatment on the Properties of Sol-Gel Derived Al-Doped ZnO Thin Films
p.16

KrF Laser CVD of Chromium Oxide by Photodissociation of Cr(CO)₆
p.20

Deposition of SiO₂ and SiO₂:Ge Films for Optical Applications in a Matrix Distributed Electron Cyclotron Resonance Reactor
p.25

Structural and Dielectric Characteristics of Ba₂MeWO₆ (Me=Mg, Ni, Zn) Double Perovskites
p.30

Microstructure and Electrical Properties of SrBi₂Ta₂O₉ Ceramics Processed by Templated Grain Growth
p.35

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ZnO:Ga Thin Films Produced by RF Sputtering at Room Temperature: Effect of the Power Density

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Materials Science Forum (Volumes 455-456)

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12-15

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.455-456.12

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Online since:

May 2004

Authors:

Elvira Fortunato, V. Assunção, António Marques, Alexandra Gonçalves, Hugo Águas, Luís Pereira, Isabel Ferreira, Francisco Manuel Braz Fernandes, Rui Jorge C. Silva, Rodrigo Martins

Keywords:

RF Magnetron Sputtering, Thin Film, Transparent Conductive Oxide, Zinc Oxide (ZnO)

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