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HomeMaterials Science ForumMaterials Science Forum Vols. 455-456Effect of Dopants on the Dynamic of Powder...

Effect of Dopants on the Dynamic of Powder Formation and the Properties of Polymorphous Silicon Thin Films

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Advanced Materials Forum II

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Periodical:

Materials Science Forum (Volumes 455-456)

Pages:

536-539

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.455-456.536

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Online since:

May 2004

Authors:

A.V. Kharchenko, V. Suendo, D. Daineka, Pere Roca i Cabarrocas

Keywords:

PECVD, Plasma Diagnostics, Polymorphous Silicon, Silicon Clusters

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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