Polyimide Surface Modification by Low Energy Ion Beam Irradiation
The surface modification of polyimide (PI) by the irradiation of 3 keV He+, Ne+ and Ar+ ions was studied using XPS and AFM at various ion dose ranging from 11014 to 11017 ions/cm2. The change of surface roughness of PI by 3 keV inert ions was closely connected to the change of surface composition. At low doses below 51015 ions/cm2, the surface of polyimide was carbonized by ion irradiations, showing rough surfaces. At higher ion doses, the surface composition was saturated due to the accumulation of damages, and the surface morphology became smoother as compared with the low dose case.
Omer Van der Biest, Michael Gasik, Jozef Vleugels
W. J. Lee et al., "Polyimide Surface Modification by Low Energy Ion Beam Irradiation", Materials Science Forum, Vols. 492-493, pp. 659-664, 2005