Polyimide Surface Modification by Low Energy Ion Beam Irradiation

Abstract:

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The surface modification of polyimide (PI) by the irradiation of 3 keV He+, Ne+ and Ar+ ions was studied using XPS and AFM at various ion dose ranging from 1􀂯1014 to 1􀂯1017 ions/cm2. The change of surface roughness of PI by 3 keV inert ions was closely connected to the change of surface composition. At low doses below 5􀂯1015 ions/cm2, the surface of polyimide was carbonized by ion irradiations, showing rough surfaces. At higher ion doses, the surface composition was saturated due to the accumulation of damages, and the surface morphology became smoother as compared with the low dose case.

Info:

Periodical:

Materials Science Forum (Volumes 492-493)

Edited by:

Omer Van der Biest, Michael Gasik, Jozef Vleugels

Pages:

659-664

DOI:

10.4028/www.scientific.net/MSF.492-493.659

Citation:

W. J. Lee et al., "Polyimide Surface Modification by Low Energy Ion Beam Irradiation", Materials Science Forum, Vols. 492-493, pp. 659-664, 2005

Online since:

August 2005

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Price:

$35.00

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