Polyimide Surface Modification by Low Energy Ion Beam Irradiation

Won Jun Lee; Youn Seoung Lee; Sa Kyun Rha; Kwang Yong Lim; Hee Soo Lee; Chung Nam Whang

doi:10.4028/www.scientific.net/MSF.492-493.659

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HomeMaterials Science ForumMaterials Science Forum Vols. 492-493Polyimide Surface Modification by Low Energy Ion...

Polyimide Surface Modification by Low Energy Ion Beam Irradiation

Abstract:

The surface modification of polyimide (PI) by the irradiation of 3 keV He+, Ne+ and Ar+ ions was studied using XPS and AFM at various ion dose ranging from 1􀂯1014 to 1􀂯1017 ions/cm2. The change of surface roughness of PI by 3 keV inert ions was closely connected to the change of surface composition. At low doses below 5􀂯1015 ions/cm2, the surface of polyimide was carbonized by ion irradiations, showing rough surfaces. At higher ion doses, the surface composition was saturated due to the accumulation of damages, and the surface morphology became smoother as compared with the low dose case.

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Materials Science Forum (Volumes 492-493)

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659-664

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https://doi.org/10.4028/www.scientific.net/MSF.492-493.659

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August 2005

Authors:

Won Jun Lee, Youn Seoung Lee, Sa Kyun Rha, Kwang Yong Lim, Hee Soo Lee, Chung Nam Whang

Keywords:

Ion Beam, Polyimide, Surface Modification

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