The Role of Energy in Formation of Sputtered Nanocomposite Films

Jindřich Musil; J. Šůna

doi:10.4028/www.scientific.net/MSF.502.291

Paper Titles

Nanoscale Dynamics at Reactive Wetting Front on SiC
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Two Dimensionally Dispersed Fe/FePd Nanocomposite Particles Synthesized by Electron Beam Deposition
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Effect of Additional Elements on the Thermal Stability of the Cu-Zr Glassy Alloys
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Microstructure and High Temperature Deformation of Grain Refined Al Alloy Foil Fabricated by RF Magnetron Sputtering
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The Role of Energy in Formation of Sputtered Nanocomposite Films
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Preparation of Super-Hard Nanocomposite Films by ICP Assisted Magnetron Sputtering
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Material Processing Using Supersonic Reactive Plasma Jets in Thermodynamical and Chemical Nonequilibrium State
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Reflecting Multi-Layer Coatings by RF Sputtering
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Enhancement of Adhesive Strength of DLC Film by Plasma-Based Ion Implantation
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HomeMaterials Science ForumMaterials Science Forum Vol. 502The Role of Energy in Formation of Sputtered...

The Role of Energy in Formation of Sputtered Nanocomposite Films

Abstract:

The paper analysis the effect of energy E, delivered to the growing film by bombarding ions and fast condensing atoms, on its (i) structure, (ii) elemental and phase composition and (iii) physical properties. A special attention is devoted to the macrostress s generated in sputtered films under ion bombardment. The conditions under which thick, low-stress sputtered films can be produced are given.

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Periodical:

Materials Science Forum (Volume 502)

Pages:

291-296

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.502.291

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Online since:

December 2005

Authors:

Jindřich Musil, J. Šůna

Keywords:

Fast Condensing Atoms, Ion Bombardment, Macrostress, Sputtering, Structure

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References

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