Control of Micro Press Using Magnetic Actuating Platform

Abstract:

In this paper, a new design of three degrees-of-freedom (DOF) plane motion system actuated by electromagnetic forces is proposed and experimentally studied. The advantages of electromagnetic driven system lie in the elimination of the backlash, friction and wear phenomena. With this new structure design the coupling between the z translation, pitching and rolling motions becomes simpler than the conventional designs. A PI controller is applied and achieves the required high precision performance of the system. The experimental studies support the effectiveness of the system.

• Periodical: Materials Science Forum (Volumes 505-507)
• Pages: 1189-1194
• DOI: https://doi.org/10.4028/www.scientific.net/MSF.505-507.1189
• Online since: January 2006
• Authors: Chieh Li Chen, Kevin S. Li
• Keywords: Electromagnetic Actuator, Nanoimprinting, Plane Motion System

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