Effect of Nano-Structures on the Optical Features of Hydrogenated Amorphous Si Films

Abstract:

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Hydrogenated amorphous Si (a-Si:H) films were prepared by plasma enhanced chemical vapor deposition (PECVD) techniques, and the effect of nano-structure on the photoluminescence (PL) phenomena of the films was investigated. The films, which were prepared at R.T., contain both amorphous and crystalline phases of 1 ~ 3 nm size nano-crystallites with {100} orientation preference while the films prepared at 500°C are composed of about 6 nm and 150 nm size crystallites. The former exhibit a strong PL intensity near blue light region, while the latter exhibiting little PL phenomena; also, the optical band gap of the former was calculated at 4.2 eV.

Info:

Periodical:

Materials Science Forum (Volumes 510-511)

Edited by:

Hyung Sun Kim, Yu Bao Li and Soo Wohn Lee

Pages:

954-957

DOI:

10.4028/www.scientific.net/MSF.510-511.954

Citation:

M. B. Park et al., "Effect of Nano-Structures on the Optical Features of Hydrogenated Amorphous Si Films", Materials Science Forum, Vols. 510-511, pp. 954-957, 2006

Online since:

March 2006

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Price:

$35.00

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