Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition

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Periodical:

Materials Science Forum (Volumes 52-53)

Edited by:

J. J. Pouch and S. A. Alterovitz

Pages:

341-364

Citation:

R.W. Collins "Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition", Materials Science Forum, Vols. 52-53, pp. 341-364, 1990

Online since:

January 1991

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$38.00

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