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HomeMaterials Science ForumMaterials Science Forum Vols. 52-53Real Time Ellipsometry Characterization and...

Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition

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Properties and Characterization of Amorphous Carbon Films

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Periodical:

Materials Science Forum (Volumes 52-53)

Pages:

341-364

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.52-53.341

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Online since:

January 1990

Authors:

R.W. Collins

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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