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HomeMaterials Science ForumMaterials Science Forum Vols. 561-565The Relationship between the Bending Direction and...

The Relationship between the Bending Direction and Burgers Vector of Threading Dislocations at a Coherent Heterointerface in AlGaN/AlN Layers

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Periodical:

Materials Science Forum (Volumes 561-565)

Pages:

2071-2074

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.561-565.2071

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Online since:

October 2007

Authors:

N. Kuwano, Tatsuo Yokote, H. Miyake, K. Hiramatsu, T. Shibata

Keywords:

Burgers Vector, Heterointerface, Internal Stress, Nitride Semiconductors, TEM, Threading Dislocation

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1016/s0022-0248(00)01017-4

[2] N. Kuwano, T. Tsuruda, Y. Adachi, S. Terao, S. Kamiyama, H. Amano, and I. Akasaki: Phys. Stat. Sol. Vol. (a) 192 (2002) , p.366.

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[3] Y. Ishida, H. Ishida, K. Kohra and H. Ichinose: Philos. Mag., Vol. 42 (1980), p.453.

[4] K. Higashida, S. Okazaki, T. Morikawa and R. Onodera: Mater. Trans. JIM, Vol. 39 (1998), p.967.

[5] A. E. Romanov and J. S. Speck: Appl. Phys. Lett. Vol. 83 (2003) , p.2569.

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63 0 0. 5 1 1. 5 2 2. 5 3 AlN AlGaN AlN AlGaN h/µm a / c.

59.

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63 0 0. 5 1 1. 5 2 2. 5 3 AlN AlGaN AlN AlGaN h/µm a / c Fig. 4 Variation in c/a of AlN and AlxGa1-xN(x=0. 5) as a function of the distance h from the interface of AlN/α-Al2O3.

DOI: 10.1021/acsphotonics.2c00370.s001