The Relationship between the Bending Direction and Burgers Vector of Threading Dislocations at a Coherent Heterointerface in AlGaN/AlN Layers

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Materials Science Forum (Volumes 561-565)

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Edited by:

Young Won Chang, Nack J. Kim and Chong Soo Lee

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2071-2074

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N. Kuwano et al., "The Relationship between the Bending Direction and Burgers Vector of Threading Dislocations at a Coherent Heterointerface in AlGaN/AlN Layers", Materials Science Forum, Vols. 561-565, pp. 2071-2074, 2007

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October 2007

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63 0 0. 5 1 1. 5 2 2. 5 3 AlN AlGaN AlN AlGaN h/µm a / c.

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63 0 0. 5 1 1. 5 2 2. 5 3 AlN AlGaN AlN AlGaN h/µm a / c Fig. 4 Variation in c/a of AlN and AlxGa1-xN(x=0. 5) as a function of the distance h from the interface of AlN/α-Al2O3.

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